System-in-package type semiconductor device
专利摘要:
An object of the present invention is to be able to test a memory chip directly from the outside. In the test circuit 16 provided in the logic chip 11, when the mode signal included in the test signal 18 input from the external connection terminal indicates a normal operation mode, the logic circuit 15 is transferred to the memory circuit 14. When the access path (wiring 17) is enabled, and the mode signal indicates the test mode, the test circuit (accessed from the external connection terminal by accessing the memory circuit 14 using the access path 17) Tests, life cycle tests, and multi-bit tests are performed according to 18). Also conduct self-diagnosis. 公开号:KR20040040327A 申请号:KR1020030046442 申请日:2003-07-09 公开日:2004-05-12 发明作者:다츠미다카시 申请人:미쓰비시덴키 가부시키가이샤; IPC主号:
专利说明:
System-in-package semiconductor device {SYSTEM-IN-PACKAGE TYPE SEMICONDUCTOR DEVICE} [33] The present invention relates to a system in a package type semiconductor device (hereinafter referred to as "SiP type semiconductor device") in which a plurality of semiconductor chips are connected to each other and sealed in one package. [34] In a SiP type semiconductor device, as a plurality of semiconductor chips, logic chips and one or more memory chips (for example, DRAM chips, SRAM chips, flash memory chips, etc.) are connected to each other and sealed in one package. The logic chip is connected to the external connection terminal, and the memory chip is connected to the external connection terminal via the logic chip (for example, Patent Document 1). [35] (Patent Document 1) [36] Japanese Patent Application Laid-Open No. 10-283777 (0021, Fig. 1) [37] By the way, in the semiconductor device, it is necessary to perform a life acceleration test at the time of a product release, in order to test in a package state, or to screen an initial defect. However, in the SiP type semiconductor device, since the input / output of the memory chip cannot be directly performed with the outside and must be performed through the logic chip, the logic chip can be tested alone, but the memory chip cannot be tested alone. . [38] This invention is made | formed in view of the above, and an object of this invention is to obtain the SiP type semiconductor device provided with the test function which can test a memory chip directly from the outside directly. [1] 1 is a structural conceptual diagram illustrating an example of a SiP semiconductor device to which the present invention is applied; [2] 2 is a conceptual diagram of the structure of a SiP semiconductor device according to the first embodiment of the present invention; [3] 3 is a block diagram showing a detailed configuration of a test circuit shown in FIG. 2; [4] FIG. 4 is a block diagram showing a configuration example of a DRAM constituting the memory circuit shown in FIG. 2; [5] 5 is a time chart showing a read operation to the DRAM shown in FIG. 4; [6] 6 is a time chart showing a write operation to the DRAM shown in FIG. 4; [7] FIG. 7 is a block diagram showing a concrete configuration example of the test circuit shown in FIG. 2; FIG. [8] 8 is a flowchart for explaining the operation of the life accelerated test circuit shown in FIG. [9] 9 is a view for explaining the operation of the extension circuit shown in FIG. 7; [10] FIG. 10 is a view for explaining the operation of the degenerate circuit shown in FIG. 7; FIG. [11] 11 is a conceptual diagram of the configuration of a SiP semiconductor device of Embodiment 2 of the present invention; [12] 12 is a conceptual diagram of the structure of a SiP type semiconductor device according to the third embodiment of the present invention; [13] 13 is a conceptual diagram of the configuration of a SiP type semiconductor device according to the fourth embodiment of the present invention; [14] Fig. 14 is a structural diagram of a SiP type semiconductor device according to a fifth embodiment of the present invention. [15] Explanation of symbols for the main parts of the drawings [16] 10, 101, 110, 120, 130: system-in-package semiconductor device (SiP type semiconductor device) [17] 11, 102, 111, 121: logic chip [18] 12, 112, 131: memory chip [19] 13: Wiring to external connection terminal [20] 14: memory circuit [21] 15: logic circuit [22] 16, 105, 113, 114, 123,132: test circuit [23] 21: memory test circuit [24] 22: selection circuit [25] 25: mode signal [26] 26: address signal of read / write [27] 27: test data signal [28] 28: Test data signal read out [29] 29: judgment result signal [30] 73 stretch circuit [31] 75: life accelerated test circuit [32] 104, 122: access control circuit [39] MEANS TO SOLVE THE PROBLEM In order to achieve the said objective, the system in-package type semiconductor device which concerns on the said memory chip which mounts a memory circuit, and the logic chip which mounts the logic circuit electrically connected with the said memory circuit are said logic. In a system-in-package type semiconductor device in which a circuit and an external connection terminal of a package are connected and sealed, a mode signal input from a mode terminal provided in the external connection terminal to either of the logic chip and the memory chip. Activates an access path to the memory circuit when the normal operation mode is indicated, while taking the access path from the logic circuit when the mode signal indicates a test mode or at a special time. To provide a test circuit for performing various tests. It shall be. [40] According to the present invention, the test circuit provided in either the logic chip or the memory chip, when the mode signal input from the external connection terminal indicates the test mode, deprives the access path to the memory circuit from the logic circuit and removes the access path. The memory circuit is accessed, the life acceleration test in the state in which the internal voltage of the memory circuit is boosted, the test data is decompressed, the test data is decompressed, the read data is degenerate, and the acceptance judgment is performed. Perform a multi-bit test. Further, at the time of power-on or after, the access path to the memory circuit is taken out of the logic circuit, and the memory circuit is accessed using the access path to perform self-diagnosis. [41] The above and other objects, features, aspects, advantages, and the like of the present invention will become more apparent from the following detailed embodiments described with reference to the accompanying drawings. [42] Hereinafter, with reference to the accompanying drawings, a preferred embodiment of the SiP type semiconductor device according to the present invention will be described in detail. [43] (Example 1) [44] 1 is a structural conceptual diagram illustrating an example of a SiP type semiconductor device to which the present invention is applied. In the SiP type semiconductor device to which the present invention is applied, for example, as shown in FIG. 1, a memory chip 2 on which a memory circuit such as DRAM is mounted is mounted on a logic chip 1 on which a logic circuit such as a microprocessor is mounted. In a chip-on-chip structure, the package is encapsulated in a package in a state in which the chips are stacked on top of each other. The input / output terminal of the memory chip 2 is connected to the logic chip 1 by the wiring 3, and is connected to the external connection terminal by the wiring 4 as part of the input / output terminal of the logic chip 1. It is. In addition, as the SiP type semiconductor device, there are other configurations in which, for example, the logic chip 1 and the memory chip 2 are arranged side by side on a plane, but the connection form is the same. [45] In the present invention, a configuration example in which the SiP type semiconductor device incorporates a test function capable of performing a single test of the memory chip 2 directly from the outside in various forms is shown. In each of the embodiments described below, however, for convenience of explanation, the logic chip and the memory chip are arranged side by side on a plane. [46] Fig. 2 is a structural diagram of a SiP type semiconductor device according to the first embodiment of the present invention. 3 is a block diagram showing a detailed configuration of a test circuit shown in FIG. 2. The SiP type semiconductor device 10 shown in FIG. 2 is composed of a logic chip 11 and a memory chip 12. The logic chip 11 is connected to the external connection terminal by the wiring 13, and is connected to the memory chip 12 by the wiring 17. [47] The memory chip 12 is equipped with, for example, a dynamic random access memory (DRAM) as the memory circuit 14. On the other hand, in addition to the logic circuit 15, the test circuit 16 is mounted on the logic chip 11 in a form interposed between the logic circuit 15 and the memory circuit 14. [48] That is, the test circuit 16 is electrically connected to the logic circuit 15 in the logic chip 11, and is connected to an external connection terminal together with the logic circuit 15 by the wiring 13. The test circuit 16 is connected to the memory circuit 14 on the memory chip 12 by the wiring 17. Therefore, the external connection terminal is comprised of the signal terminal in the normal operation provided to the logic circuit 15, and the terminal of the test signal 18 in the test mode provided to the test circuit 16. As shown in FIG. [49] The test circuit 16 uses the wiring 17 as a common access path to the memory circuit 14, and outputs the output signal 19 and the like of the logic circuit 15 on the wiring 17 during normal operation. During the test, a test control signal is output on the wiring 17 in accordance with the test signal 18. [50] As shown in FIG. 3, the test circuit 16 includes a memory test circuit 21 and a selection circuit 22. As the test signal 18, the mode signal 25, the read / write address signal 26, the test write data signal 27, the read test data signal 28, the determination result signal 29, An access control signal 24 is illustrated. [51] When the mode signal 25 input from the external connection terminal is the "test mode", the selection circuit 22 directly connects the memory test circuit 21 and the memory circuit 14 by the wiring 17 to test the memory. Access to the memory circuit 14 of the circuit 21 is enabled, and in the "normal operation mode", the logic circuit 15 is directly connected between the logic circuit 15 and the memory circuit 14 by the wiring 17. ) Is allowed to access the memory circuit 14. [52] When the mode signal 25 input from the external connection terminal is the "test mode", the memory test circuit 21 reads and writes the address signal 26 input from the external connection terminal and the test write data signal 27. And the access circuit control the memory circuit 14 via the wiring 17 via the selection circuit 22 or by increasing the internal voltage of the memory circuit 14 to the memory circuit 14. With the stress applied, a read / write operation similar to that of the cell checker is performed, and the life acceleration test is performed. The memory test circuit 21 outputs the test data signal 28 read during the test to an external connection terminal. [53] In addition, when the mode signal 25 input from the external connection terminal is the "multi bit test mode", the memory test circuit 21 similarly takes the access path to the memory circuit 14 from the logic circuit 15 and performs a test. The data is decompressed and written to the memory circuit 14, the read data is degenerate and passed or not, and the determination result signal 29 is output to the external connection terminal together with the determined test data signal 28. [54] In addition, the memory test circuit 21 takes the access path to the memory circuit 14 from the logic circuit 15 at the time of power-on and at any time thereafter, generates various test patterns, and selects the selection circuit 22. The memory circuit 14 has a built-in self-test (BIST) function that writes to the memory circuit 14, compares the write data with the read data, and detects a bad bit. [55] In the case of having a self-diagnostic (BIST) function, a second memory chip is provided in the SiP type semiconductor device 10, and a defect detected at the time of BIST in the second memory circuit mounted on the second memory chip. Accumulate address information of bits. In this case, since the spare part can be accessed by avoiding the bad bit, the same operation as that of cutting the fuse of the bad address is realized, and the bad bit can be saved. It is also possible to store the address information of the bad bit in the memory circuit 14 without providing the second memory chip. [56] In addition, if the second memory chip is provided in this manner, the manufacturing process is not complicated, and the chip area of the second memory chip is not increased by allowing the logic circuit 15 to share the memory circuit 14 with the second memory circuit. It ends without, i.e., without deteriorating yield, so that the second memory chip can be embedded at low cost. As the second memory circuit, a flash memory, a DRAM, or a static random access memory (SRAM) can be used. [57] Next, with reference to FIGS. 4-8, the test circuit 16 is demonstrated concretely. 4 is a block diagram showing an example of the structure of a DRAM constituting the memory circuit 14 shown in FIG. 5 and 6 are time charts showing read / write operations to the DRAM shown in FIG. FIG. 7 is a block diagram showing a specific configuration example of the test circuit 16 shown in FIG. 2. FIG. 8 is a flowchart illustrating the operation of the life accelerated test circuit 75 shown in FIG. 7. FIG. 9 is a view for explaining the operation of the expansion circuit 73 shown in FIG. FIG. 10: is a figure explaining the operation | movement of the degenerate circuit 76 shown in FIG. 7, the self-diagnosis (BIST) function is omitted. [58] The DRAM, which is the memory circuit 14 shown in FIG. 4, has two memory cell arrays 55, 56. Each has a capacity of 32 megabytes (Mb), one memory cell array 55 is referred to as bank # 0, and the other memory cell array 56 is referred to as bank # 1. [59] The DRAM includes an input terminal 41 of the address signal A0-11, an input terminal 42 of the bank selection signal BA0 specifying one of the banks # 0 and # 1, and an operation clock CLK as an input / output terminal. Input terminal 43, input terminal 44 of control signal CKE for switching the use state of operation clock CLK, input terminal 45 of chip select signal ZCS, and input terminal 46 of row address strobe signal ZRAS. And an input terminal 47 of the column address strobe signal ZCAS, an input terminal 48 of the write enable signal ZWE, an input terminal 49 of the write data signal DQM0-15, and an output of the read data signal DQ0-127. The terminal 50 is provided. The bank select signal BA0 indicates the designation of bank # 0. When specifying bank # 1, it is set to BA1. [60] The clock circuit 51, the address buffer 52, the control signal buffer 53, the control circuit 54, and the I / O buffer are peripheral circuits of the two memory cell arrays 55 and 56. 57 is provided. [61] The clock buffer 51 supplies a signal obtained by taking the logical product of both the operation clock CLK and the control signal CKE input from the input terminals 43 and 44 to the address buffer 52, the control signal buffer 53, and the control circuit 54. Output The address buffer 52 outputs the address signals A0-11 and bank selection signal BA0 input from the input terminals 41 and 42 to the control circuit 54 in accordance with the output of the clock buffer 51. [62] The control signal buffer 53 stores the chip select signal ZCS inputted from the input terminals 45 to 49, the row address strobe signal ZRAS, the column address strobe signal ZCAS, the write enable signal ZWE, and the write data signal DQM0-15. It outputs to the control circuit 54 according to the output of 51). [63] The control circuit 54 takes in each of the output signals of the address buffer 52 and the control signal buffer 53 in accordance with the output of the clock buffer 51 and writes them to the memory cell arrays 55 and 56 based on them. And control the readings. The I / O buffer 57 outputs read data of the memory cell arrays 55 and 56 to the output terminal 50. [64] Next, in Figs. 5 and 6, commands such as activation "ACT" and precharge "PRE" are issued in the combination of the following signals. Activation "ACT" is issued under the condition that ZRAS = L and ZCAS = ZWE = H. The read "READ" is issued under the conditions of ZRAS = H, ZCAS = L, and ZWE = H. The write "Write" is issued under the condition that ZRAS = H and ZCAS = ZWE = L. The precharge "PRE" is issued under the conditions of ZRAS = L, ZCAS = H and ZWE = L. [65] In FIG. 5, after performing activation "ACT" for bank # 0 and activation "ACT" for bank # 1 shown in FIG. 4, read "READ" is performed from bank # 1, and read data DQ "Qb0, Qb1, Qb2, Qb3 "is output. In this process, the precharge "PRE" is performed for both the bank # 0 and the bank # 1, and the form which transitions to the activation "ACT" with respect to the bank # 0 is shown. [66] In FIG. 6, after performing activation "ACT" with respect to bank # 0 shown in FIG. 4, writing "Write" of write data DQ "Qa0, Qa1, Qa2, Qa3" is performed to bank # 0. Thereafter, a precharge "PRE" is performed for the bank # 0, and the transition to the activation "ACT" for the bank # 0 is shown. 5 and 6 are performed with the logic circuit 15 in the normal operation mode, and with the test circuit 16 in the test mode. [67] In FIG. 7, the DRAM which is the memory circuit 14 has the configuration shown in FIG. 4, but four monitor terminals "TESTMODE", "FRCMONI1", "FRCMONI2" and "VBB" are added. Although not shown in Fig. 7, an operating power supply VDD and an external power supply EXVDD are provided. [68] In the test circuit shown in FIG. 7, the operation clock CLK, the control signal CKE, the chip select signal ZCS, the row address strobe signal ZRAS, the column address strobe signal ZCAS, the write enable signal ZWE, and the readout are used as input / output signals to the logic circuit 15. Data DQ0-7, address signal A0-11, write data signal DQM0-15, and bank select signal BA0 are shown. [69] The operation clock CLK includes the FF circuits 71 and 78 composed of a DRAM which is the memory circuit 14, a flip-flop (hereinafter referred to as "FF"), a life acceleration test circuit 75, and a degenerate circuit 76. And the decode circuit 77. The remaining signals are all input to the selector 72. [70] In the test circuit shown in FIG. 7, the test control signal TSTCKE, the test write data TSTDQM0-15, the test chip select signal TSTZCS, the test row address strobe signal TSTZRAS, and the test column address strobe signal TSTZCAS as input / output signals to the external connection terminal. , Test write enable signal TSTZWE, test write data signal TSTD0-7, test address signal TSTA0-11, test bank select signal TSTBA0, test read data signal TSTQ0-7, multi-bit test output signal TSTMBTO, test mode signal TSTMODEA, TSTMODEB , TSTMODE2, voltage force monitor signals TSTFRCMONI1, TSTFRCMONI2, and VBB are shown. [71] Among them, the test control signal TSTCKE, test record data TSTDQM0-15, test chip select signal TSTZCS, test row address strobe signal TSTZRAS, test column address strobe signal TSTZCAS, test record enable signal TSTZWE, test record data signal TSTD0-7, Each terminal of the test address signal TSTA0-11, the test bank selection signal TSTBA0, and the test read data signal TSTQ0-7 is connected to the FF circuit 78. [72] The FF circuit 78 outputs each signal of the test control signal TSTCKE, the test write data TSTDQM0-15, and the test chip select signal TSTZCS to the selector 72. The FF circuit 78 also includes a test row address strobe signal TSTZRAS, a test column address strobe signal TSTZCAS, a test write enable signal TSTZWE, a test write data signal TSTD0-7, a test address signal TSTA0-11, and a test bank select signal TSTBA0. Each signal is output to the selector 74. The FF circuit 78 also outputs the test read data signal DQ0-127 input from the selector 74 to the corresponding terminal for each 8-bit test read data signal TSTQ0-7. The test read data signal DQ0-127 output by the selector 74 is also input to the degenerate circuit 76. [73] The terminal of the multi-bit test output signal TSTMBTO is connected to the output terminal of the degenerate circuit 76. The terminal of the test mode signal TSTMODE2 is connected to the test mode terminal TETMODE of the DRAM which is the memory circuit 14. Each terminal of the voltage force monitor signals TSTFRCMONI1, TSTFRCMONI2, VBB is connected to the corresponding monitor output terminals FRCMONI1, FRCMONI2, VBB of the DRAM which is the memory circuit 14, respectively. [74] Each terminal of the test mode signals TSTMODEA and TSTMODEB is connected to an input terminal of the decode circuit 77. The decode circuit 77 generates four signals 80, 81, 82, 83 from those signals. The signal 80 is an acceleration test signal and is input to the life acceleration test circuit 75 and the selector 74. The signal 81 is a multi-bit test signal and is input to the degenerate circuit 76, the decompression circuit 73, and the selector 72. The signal 82 is a signal indicating whether or not to test and is input to the selector 72. The signal 83 is a voltage monitor enable signal and is used to turn on / off respective terminals of the voltage force monitor signals TSTFRCMONI1, TSTFRCMONI2, and VBB. [75] The life acceleration test circuit 75 receives the acceleration test signal 80, generates an address signal, a data signal, and a control signal necessary for the acceleration test, and outputs it to the selector 74. The selector 74 receives the acceleration test signal 80 and selectively outputs the output of the life acceleration test circuit 75 to the selector 72. The selector 74 also applies the test read data signal DQ0-127 output by the selector 72 to the FF circuit 78 and the degenerate circuit 76 as described above. [76] The decompression circuit 73 receives the multi-bit test signal 81, decompresses (see FIG. 9) the test write data signal TSTD0-7 input from the selector 74, and outputs the result to the selector 72. The degenerate circuit 76 receives the multi-bit test signal 81, degenerates the test write data signal DQ0-127 input from the selector 74 (see FIG. 10), and serves as the multi-bit test output signal TSTMBTO. Output to the corresponding terminal. [77] The FF circuit 71 is composed of a control signal CKE, a chip select signal ZCS, a row address strobe signal ZRAS, a column address strobe signal ZCAS, a write enable signal ZWE, and read data between the DRAM which is the memory circuit 14 and the selector 72. The number of signals of DQ0-127, address signal A0-11, write data signal DQM0-15, and bank select signal BA0 is controlled. [78] The selector 72 connects the input terminal of the logic circuit 15 and the FF circuit 71 when the signal 82 indicating whether or not a test is not performed, that is, indicates a normal operation mode, performs a test. That is, in the case of indicating the test mode, the FF circuit 78, the selector 74, the expansion circuit 73, and the FF circuit 71 are connected. [79] In the above configuration, the operation of the life acceleration test circuit 75 and the operation of the decompression circuit 73 and the degenerate circuit 76 will be described. First, the operation of the life acceleration test circuit 75 will be described with reference to FIG. 8. [80] In FIG. 8, in step ST1, the life acceleration test circuit 75 receives the acceleration test signal 80 to set a period for setting the operation mode in the test mode. This is, for example, 1 of the operation clock CLK after a suitable time after the chip select signal ZCS, the row address strobe signal ZRAS, the column address strobe signal ZCAS, the write enable signal ZWE, the address signal A0-11, the bank select signal BA0, etc. are extinguished. The clock period is selected. [81] In step ST2, although a plurality of internal power sources exist in the DRAM, the life acceleration test circuit 75 sets an operation mode in which the internal voltage is boosted (forced) in the source test mode register. Various operation modes are prepared, and arbitrary arbitrary forced internal voltages are obtained by setting an arbitrary operation mode from the outside using the address signal TSTA0-11, the bank selection signal TSTBA0 and the like. [82] Here, as an operation mode for obtaining one forced internal voltage, for example, a mode signal TMRBIALLBNK for operating all banks at the same time, a mode signal TMBTB for stretching and degenerating (multi-bit test), and one of the special operations during the life acceleration test. The in-mode signal TMRAB125, the mode signal TMVREFSFRC for supplying the reference voltage VREFS for generating the operating voltage of the memory cell array unit, and the mode signal TMVDDEXVDD for shorting the operating power supply VDD and the external power supply EXVDD in the DRAM are sequentially placed in the test mode register. Set it. [83] As a result, when 3.65 V, for example, is applied from the external power supply EXVDD, the word line voltage VPP becomes 4.8 V, and both the operating voltage VCCS of the memory cell array unit and the operating voltage VCCP of the peripheral circuit become 3.75 V. The value of the forced internal voltage is monitored at each terminal of the voltage force monitor signals TSTFRCMONI1, TSTFRCMONI2, and VBB. [84] Specifically, -1.0 V is normally observed at the terminal of the voltage force monitor signal VBB. At the terminal of the voltage force monitor signal TSTFRCMONI1, the reference voltage VREFS and the voltage VCP applied on the cell plate are monitored. At the terminal of the voltage force monitor signal TSTFRCMONI2, the reference voltage VREFP generating the operating voltage VCCP of the peripheral circuit, the reference voltage VREFD generating the word line voltage VPP, and the bit line voltage VBL are monitored. [85] In step ST3, test data is written to the entire surface {<X, Y> = <0, 0> to <Xmax, Ymax>} of the memory cell array. This is done by first accessing the row address +1, returning to zero when the row address is full, then +1 the column address, and repeating the access by +1 the row address again. do. The address signal and data signal are scrambled. [86] In step ST3, data is read from the entire surface {<X, Y> = <0, 0> to <Xmax, Ymax>} of the memory cell array. This read operation is also performed in the same order as the above write operation. The read data is output from the terminal of the test read data signal TSTQ0-7, and the acceptance check is made by the cell checker. [87] In step ST4, the test data is inverted logically, and steps ST3 and ST4 are repeated. Then, steps ST3 to ST5 are repeated within the prescribed time in order to maintain the stressed state (steps ST6 and ST7). [88] 9, the decompression circuit 73 copies the 8-bit unit test data signals DQ <7: 0> input from the selector 74, and 16 16-bit unit test data signals DQ <7. ; 0> to DQ <127: 120> are generated respectively, and they are output in parallel to the selector 72 in parallel. This is input to the terminal of the write data signal DQ0-127 of the DRAM. [89] In FIG. 10, the degenerate circuit 76 receives the test data signals DQ <7: 0> to DQ <127: 120> in 8-bit units, which are input from the selector 74, in order to receive the first test data signal. DQ <7: 0> and each subsequent test data signal DQ are compared by taking an exclusive OR every 8 bits. If all 8 bits match, the multi-bit test output signal TSTMBO is set to the "H" level, and if it does not match, the multi-bit test output signal TSTMBO is set to the "L" level. [90] That is, the degenerate circuit 76 outputs the multi-bit test output signal TSTMBO which degenerates 16 eight-bit unit test data signals DQ <7: 0> to DQ <127: 120> into 16 bits. The multi-bit test output signal TSTMBO is a signal indicating the result of the positive judgment. [91] As described above, according to the first embodiment, since the test circuit for accessing the memory circuit is provided to the logic chip by taking the path for accessing the memory circuit on the memory chip out of the logic circuit, the test circuit is instructed from the external connection terminal. You can test the memory by In addition, by accelerating the internal voltage of the DRAM, which is a memory circuit, a life acceleration test can be performed, and a multi-bit test can be performed. [92] In addition, since the test circuit can be configured to take the path for accessing the memory circuit on the memory chip from the logic circuit at the time of power-on or when necessary afterwards, to access the memory circuit by itself, at the time of power-on or afterwards. When necessary, self-diagnosis (BIST) can be performed to provide a function of error bit detection. In addition, the external connection terminals provided for the test can be reduced. [93] (Example 2) [94] Fig. 11 is a schematic conceptual view of the SiP type semiconductor device according to the second embodiment of the present invention. 11, the same code | symbol is attached | subjected to the component same as or equivalent to the structure shown in FIG. Here, the description will be focused mainly on the part related to the second embodiment. [95] In the SiP type semiconductor device 101 shown in FIG. 11, in the configuration shown in FIG. 2, a logic chip 102 is provided instead of the logic chip 11. In the logic chip 102, the logic circuit 15 shown in FIG. 2 is separated into an original logic circuit 103 and an access control circuit 104 that controls access to the memory circuit 14. The access control circuit 104 is configured to be able to switch control subjects from the outside and is arranged at an arrangement position of the test circuit 16 shown in FIG. 2. And the test circuit 105 which the test signal 18 is input from the external connection terminal is arrange | positioned so that switching control of the control principal of the access control circuit 104 can be carried out. [96] In other words, when the mode signal included in the test signal 18 indicates the "normal operation mode", the test circuit 105 switches the control subject of the access control circuit 104 to the logic circuit 103 to convert the logic circuit ( Access to the memory circuit 14 from 103 is enabled. [97] On the other hand, when the mode signal indicates "test mode", the test circuit 105 switches the control principal of the access control circuit 104 to the test circuit 105 which is its own. Therefore, the test circuit 105 accesses the memory circuit 14 using the access control circuit 104 to perform the test and the life acceleration test described in the first embodiment. [98] That is, in the case of the life acceleration test, the test circuit 105 switches the control subject of the access control circuit 104 to the test circuit 105 which is its own, and uses the access control circuit 104 as shown in FIG. 8. Do the processing. [99] In addition, when the mode signal is the "multi bit test mode", the test circuit 105 switches the control principal of the access control circuit 104 to the test circuit 105 thereof. Then, the extended test data is written to the memory circuit 14 using the access control circuit 104, and the test data read out from the memory circuit 14 is degenerate using the access control circuit 104 to determine whether the test is successful. The determination result signal is output to the external connection terminal together with the read test data signal. [100] In addition, the test circuit 105 switches the control principal of the access control circuit 104 to its own test circuit 105 at the time of power-on and at any time thereafter, and generates various test patterns, thereby generating an access control circuit ( The self-diagnosis (BIST) which writes to the memory circuit 14 using the 104, and compares the read data using the write data and the access control circuit 104, and detects a bad bit can be performed. In this BIST, a positive judgment is made and the judgment result signal is output to the external connection terminal together with the test data signal read out. [101] In the case of having a self-diagnosis (BIST) function, a second memory chip is provided in the SiP type semiconductor device 101, for example, in the same manner as in the first embodiment, and is mounted on the second memory chip. To store the address information of the bad bit detected at the time of BIST. [102] As described above, according to the second embodiment, since the access control circuit included in the logic circuit is arranged in the logic chip so as to enable switching control of the control subject from the test circuit, the access control circuit used during normal operation is used. Various tests similar to those of Example 1 can be performed. [103] (Example 3) [104] 12 is a conceptual diagram of the configuration of a SiP type semiconductor device according to the third embodiment of the present invention. 12, the same code | symbol is attached | subjected to the component same as or equivalent to the structure shown in FIG. Here, the description will be mainly focused on the part related to the third embodiment. [105] In the SiP type semiconductor device 110 shown in FIG. 12, in the configuration shown in FIG. 2, a logic chip 111 is provided instead of the logic chip 11, and a memory chip 112 is provided instead of the memory chip 12. have. [106] In the logic chip 111, the test circuit 113 is provided in place of the test circuit 16 in the logic chip 11 shown in FIG. 2. In the memory chip 112, a test circuit 114 connected to the memory circuit 14 shown in FIG. 2 is provided. That is, although the test circuit 114 adds some functions to the circuit used when testing the memory chip 112 in the wafer state, it is provided in the form interposed between the test circuit 113 and the memory circuit 14. have. Therefore, the test circuit 113 and the test circuit 114 are connected by the wiring 17. [107] The test circuit 113 transmits the mode signal included in the test signal 18 to the test circuit 114 as it is, and also switches between normal operation mode and test mode according to the mode signal, and tests on the memory chip 112. The circuit 114 is operated to give a test instruction. [108] That is, the test circuit 113 directly connects the logic circuit 15 and the wiring 17 when the mode signal included in the test signal 18 is the "normal operation mode", and the logic circuit 15 outputs the output signal. (19) and the like can be sent out on the wiring 17. [109] On the other hand, when the mode signal is "test mode" and "life acceleration test", the test circuit 113 directly connects the built-in "control circuit which gives a test instruction" and the wiring 17, and corresponding test instructions and tests are performed. Data is sent out on the wiring 17. [110] In addition, the test circuit 113 directly connects the built-in "control circuit for giving test instructions" and the wiring 17 at the time of power-on and at any time thereafter, and performs self-diagnosis from the "control circuit for giving test instructions". BIST) instruction and test data are sent out onto the wiring 17. [111] The test circuit 114 directly connects the wiring 17 and the memory circuit 14 when the mode signal transmitted from the test circuit 113 is the "normal operation mode". As a result, the logic circuit 15 can access the memory circuit 14. [112] On the other hand, when the mode signal transmitted from the test circuit 113 is "test mode" and "life acceleration test", the test circuit 114 issues a "test instruction" of the test circuit 113 from the wiring 17. The test instruction sent by the control circuit " is taken in, and in the test instruction for the " test mode " Is output to the "control circuit which gives a test instruction" of the test circuit 113. [113] In the instruction of the "multi-bit test mode", since the "control circuit which gives a test instruction" of the test circuit 113 extends and transmits test data, it writes it to the memory circuit 14, and the memory circuit 14 Is outputted to the "control circuit which gives a test instruction" of the read test circuit 113. In the " control circuit for giving test instructions " of the test circuit 113, the received test data is degenerate to make a positive judgment, and the determination result signal is output to the external connection terminal together with the read test data signal. [114] In addition, the test circuit 114 receives the test pattern data transmitted from the "control circuit for giving a test instruction" of the test circuit 113 whenever the instruction of the self-diagnosis (BIST) is input. Is written to the " control circuit for giving test instructions " from the memory circuit 14 to the read test circuit 113. In the " control circuit for giving test instructions " of the test circuit 113, the test result is compared with the transmitted test data, and both parts are judged, and the judgment result signal is output to the external connection terminal together with the received test data signal. do. [115] In the case of having a self-diagnostic (BIST) function, a second memory circuit is provided in the SiP type semiconductor device 110, for example, in the same manner as in the first embodiment, and is mounted on the second memory chip. To store the address information of the bad bit detected at the time of BIST. [116] As described above, according to the third embodiment, since the test circuit is provided in both the logic chip and the memory chip, in addition to being able to perform a single test of the memory chip directly from the outside, the internal voltage is determined by the test circuit of the memory chip. It is possible to determine whether or not the good condition is maintained after the setting for changing the number of times and the life acceleration test, so that the accuracy of the test can be further increased. [117] (Example 4) [118] Fig. 13 is a schematic diagram of the structure of a SiP semiconductor device according to the fourth embodiment of the present invention. In addition, in FIG. 13, the same code | symbol is attached | subjected to the component same as or equivalent to the structure shown in FIG. 2, FIG. 11, and FIG. Here, the description will be mainly focused on the part related to the fourth embodiment. [119] The SiP type semiconductor device 120 shown in FIG. 13 is composed of a logic chip 121 and a memory chip 112 shown in FIG. 12. In the logic chip 121, the test circuit 123 is provided in place of the test circuit 105 in the configuration shown in FIG. 11. The test circuit 114 on the memory chip 112 is connected by the access control circuit 104 and the wiring 17. [120] The test circuit 123 transmits the mode signal included in the test signal 18 to the test circuit 114 as it is via the access control circuit 104, and the mode signal included in the test signal 18 is "normal". "Operation mode", the control principal of the access control circuit 104 is switched to the logic circuit 103. The output signal 19 or the like of the logic circuit 103 can be sent out from the access control circuit 104 onto the wiring 17. [121] On the other hand, when the mode signal is "test mode" or "life acceleration test", the test circuit 123 switches the control principal of the access control circuit 104 to the test circuit 123 which is its own. The test circuit 123 then sends the corresponding test instruction onto the wiring 17 using the access control circuit 104. In addition, the test circuit 123 switches the control subject of the access control circuit 104 to its own test circuit 123 at the time of power-on and at any time thereafter, and sends an instruction of the self diagnosis (BIST) to the access control circuit ( 104 is sent out onto the wiring 17. [122] The test circuit 114 directly connects the wiring 17 and the memory circuit 14 when the mode signal transmitted from the test circuit 123 via the access control circuit 104 is the "normal operation mode". As a result, the logic circuit 103 can access the memory circuit 14. [123] On the other hand, when the mode signal transmitted from the test circuit 123 via the access control circuit 104 is "test mode" or "life acceleration test", the test circuit 114 accesses the access control circuit from the wiring 17. The test instruction 104 is sent out, and in the test instruction for the "test mode", the memory circuit 14 is accessed in accordance with the instruction, the test and the life acceleration test described in Example 1 are performed, and the result data. Is output to the test circuit 123 via the access control circuit 104. [124] In the instruction of the "multi-bit test mode", since the test circuit 123 extends and transmits test data, the test circuit 114 writes it to the memory circuit 14 and reads it from the memory circuit 14. The control circuit 104 outputs the result to the test circuit 123 via the access control circuit 104. The test circuit 123 degenerates the received test data and makes a positive judgment, and outputs the judgment result signal to the external connection terminal together with the test data signal read out. [125] In addition, the test circuit 114 receives the self-diagnosis (BIST) instruction from the test circuit 123 via the access control circuit 104, and the test circuit 123 passes through the access control circuit 104 each time. The test pattern data transmitted from the C1) is written into the memory circuit 14, read from the memory circuit 14, and output to the test circuit 123 via the access control circuit 104. The test circuit 123 compares the received test data with the transmitted test data, makes a determination of both parts, and outputs the determination result signal to the external connection terminal together with the received test data signal. [126] In the case of having a self-diagnostic (BIST) function, a second memory circuit is provided in the SiP type semiconductor device 120, for example, in the same manner as in the first embodiment, and is mounted on the second memory chip. The address information of the bad bit detected at the time of BIST is stored. [127] As described above, according to the fourth embodiment, as in the second embodiment, the access control circuit included in the logic circuit can be taken away from the logic circuit and used, so that the test circuit can be used from the outside using an access control circuit used during normal operation. A single test of the memory chip can be performed. In addition, the external connection terminals provided for the test can be reduced. [128] At this time, similarly to the third embodiment, since the test circuit is provided in both the logic chip and the memory chip, the good condition is maintained after the setting or life acceleration test in which the internal voltage is changed in plural by the test circuit of the memory chip. Since it is possible to determine whether or not there is, it is possible to further increase the accuracy of the test. [129] In addition, in the fourth embodiment, the self-diagnosis (BIST) circuit is present in the test circuit 123. However, the present invention is not limited to this, but may be provided in the test circuit 114. [130] (Example 5) [131] 14 is a conceptual diagram of the configuration of a SiP semiconductor device according to a fifth embodiment of the present invention. 14, the same code | symbol is attached | subjected to the component same as or equivalent to the structure shown in FIG. Here, the description will be focused mainly on the part related to the fifth embodiment. [132] The SiP type semiconductor device 130 shown in FIG. 14 is composed of a logic chip 131 and a memory chip 132. The logic chip 131 omits the test circuit 16 from the logic chip 11 shown in FIG. 2, and the test signal 18 and the output signal 19 of the logic circuit 15 from the external connection terminal are added. It is said that it is sent out directly on the wiring 17. [133] In the memory chip 132, a test circuit 133 connected to the memory circuit 14 illustrated in FIG. 2 is provided, and the wiring 17 is connected to the memory circuit 14 via the test circuit 133. have. [134] The test circuit 133 has the configuration shown in FIG. 3 and is configured to operate in the same manner as the test circuit 16 shown in FIG. 2. That is, when the mode signal included in the test signal 18 from the external connection terminal is the "normal operation mode", the output signal 19 of the logic circuit 15 is supplied directly to the memory circuit 14. [135] On the other hand, when the mode signal is "test mode" or "life acceleration test", the memory test circuit 21 and the memory circuit 14 shown in Fig. 3 are connected to perform a test, a life acceleration test, and a multi-bit test. . In addition, the test circuit 133 performs a self-diagnosis (BIST) at the time of power supply and afterwards. [136] In the case of having a self-diagnosis (BIST) function, a second memory chip is provided in the SiP type semiconductor device 130, for example, in the same manner as in the first embodiment, and is mounted on the second memory chip. The same applies to the first embodiment in which the address information of the bad bits detected at the time of BIST is accumulated in the memory. [137] As described above, according to the fifth embodiment, since the test circuit for accessing the memory circuit is provided by taking the path for accessing the memory circuit from the logic circuit to the memory chip, by instructing the test circuit from the external connection terminal, The voltage increase operation of the internal voltage of the DRAM, which is a memory circuit, can be performed to accelerate the life test and to perform a multi-bit test. In addition, since the test circuit is provided on the memory chip side, a more detailed test can be performed than in the first embodiment, and the test accuracy can be further improved. [138] In each embodiment, a DRAM is shown as a memory circuit to be mounted on a memory chip. However, in addition, a SiP semiconductor device composed of a memory chip and a logic chip, for example, an SRAM or a flash memory, or a logic chip and a logic chip, It goes without saying that the same applies to SiP semiconductor devices having various configurations, regardless of the combination such as SiP semiconductor devices. For SRAM or flash memory, at least a multi-bit test and a self test (BIST) can be performed as well. [139] As mentioned above, although the invention made by this inventor was demonstrated concretely according to the said Example, this invention is not limited to the said Example and can be variously changed in the range which does not deviate from the summary. [140] As described above, according to the present invention, in one of the logic chip and the memory chip, the logic circuit on the logic chip accesses the path for accessing the memory circuit on the memory chip from the logic circuit according to an instruction from the outside, thereby removing the access path. Since the test circuit for accessing the memory circuit is provided, the test, the life acceleration test, and the multi-bit test can be executed externally only on the memory chip. [141] In addition, the test circuit may be configured such that, at or after power-on, the logic circuit on the logic chip accesses the memory circuit on the memory chip from the logic circuit and accesses the memory circuit using the access path. Therefore, self-diagnosis can be performed.
权利要求:
Claims (6) [1" claim-type="Currently amended] A system-in-package type semiconductor device in which a memory chip mounting a memory circuit and a logic chip mounting a logic circuit electrically connected to the memory circuit are sealed by connecting the logic circuit and an external connection terminal of a package. In Either one of the logic chip and the memory chip, When the mode signal inputted from the mode terminal provided in the external connection terminal indicates a normal operation mode, the logic circuit enables the access path to the memory circuit, When the mode signal indicates a test mode or at a special time, a test circuit for taking various tests by accessing the memory circuit by taking the access path from the logic circuit is provided. System-in-packaged semiconductor device, characterized in that. [2" claim-type="Currently amended] The method of claim 1, In the case where the test circuit is disposed on the logic chip, an access control circuit for controlling access to the memory circuit included in the logic circuit may be used by the logic circuit or the test circuit. A system-in-packaged semiconductor device, characterized in that the switching control. [3" claim-type="Currently amended] The method according to claim 1 or 2, In the case where the test circuit is disposed in the logic chip, And a sub-test circuit for accessing the memory circuit in accordance with an instruction from the test circuit in the memory chip. [4" claim-type="Currently amended] The method according to claim 1 or 2, The test circuit has a function of performing a life acceleration test by operating an operation of boosting the internal voltage of the memory circuit based on test data input from a test terminal provided in the external connection terminal. In-packaged semiconductor device. [5" claim-type="Currently amended] The method according to claim 1 or 2, The test circuit has a function of performing a multi-bit test for decompressing and writing test data input from a test terminal provided in the external connection terminal to the memory circuit, and degenerating the read data to make a positive decision. System-in-packaged semiconductor device, characterized in that. [6" claim-type="Currently amended] The method according to claim 1 or 2, The test circuit generates various test patterns at the time of power-up and at any particular time thereafter, such as at the time of power-on, writes to the memory circuit, compares write data with read data, and performs self-diagnosis to detect bad bits. A system-in-packaged semiconductor device having a function of.
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同族专利:
公开号 | 公开日 CN1499636A|2004-05-26| US20040085796A1|2004-05-06| TW588371B|2004-05-21| KR100515168B1|2005-09-16| TW200407899A|2004-05-16| DE10321913A1|2004-05-27| CN1292481C|2006-12-27| US6925018B2|2005-08-02| JP2004158098A|2004-06-03|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题
法律状态:
2002-11-06|Priority to JP2002322321A 2002-11-06|Priority to JPJP-P-2002-00322321 2003-07-09|Application filed by 미쓰비시덴키 가부시키가이샤 2004-05-12|Publication of KR20040040327A 2005-09-16|Application granted 2005-09-16|Publication of KR100515168B1
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申请号 | 申请日 | 专利标题 JP2002322321A|JP2004158098A|2002-11-06|2002-11-06|System-in-package type semiconductor device| JPJP-P-2002-00322321|2002-11-06| 相关专利
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